| |
[IMP304-02]: ACXELIS HC3; Axcelis High Current Implanter HC3, 0.2 keV - 80keV, batch type, virtual slotted disk, beamline-Upgrade 7.0/ Block 5, 6 Bottle Gas Box, Eterna Ion Source (Mo), Xe-PEF, long fingers vacuum cassette, disk cooling flow monitoring, 4 loadports; Weight: 19750 kg; Dimension: 6005x2895x2878 mm.
| 2003 | ACXELIS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/IMP304-02.pdf |
| |
[IMP304-03]: ACXELIS HC3; Axcelis High Current Implanter HC3, 0.2 keV - 80keV, batch type, virtual slotted disk, beamline-Upgrade 7.0/ Block 5, 6 Bottle Gas Box, Eterna Ion Source (Mo), Xe-PEF, long fingers vacuum cassette, disk cooling flow monitoring, 4 loadports; Weight: 19750 kg; Dimension: 6005x2895x2878 mm.
| 2005 | ACXELIS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/IMP304-03.pdf |
| |
[IMP302-02]: ACXELIS HE3; Axcelis High Energy Implanter HE3, batch type, 10keV - 1.5MeV singly charged, 12 resonator linac, batch type, fully segmented disk, 6 Bottle Gas Box, ELS Ion Source, long fingers vacuum cassette, 4 loadports; Weight: 17388 kg; Dimension: 6940x3750x2900 mm.
| 2001 | ACXELIS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/IMP302-02.pdf |
| |
[IMP302-01]: ACXELIS HE3; Axcelis High Energy Implanter HE3, batch type, 10keV - 1.5MeV singly charged, 12 resonator linac, batch type, fully segmented disk, 6 Bottle Gas Box, ELS Ion Source, long fingers vacuum cassette, 4 loadports; Weight: 17388 kg; Dimension: 6940x3750x2900 mm.
| 1998 | ACXELIS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/IMP302-01.pdf |
| |
[ETC380-01]: AMAT Centura AP; 300mm AMAT Centura AP with 2 Side Storage Pods and 2 Load Ports; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC380-01-A]: AMAT DPS2 CIP1 chamber
[ETC380-01-B]: AMAT DPS2 CIP1 chamber
[ETC380-01-C]: AMAT DPS2 CIP1 chamber
[ETC380-01-D]: AMAT DPS2 Advantedge G5 chamber
| 2003 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC380-01.pdf |
| |
[ETC380-02]: AMAT Centura AP; 300mm AMAT Centura AP with 2 Side Storage Pods and 2 Load Ports; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC380-02-A]: AMAT eMax CT3 chamber
[ETC380-02-B]: AMAT eMax CT plus chamber
[ETC380-02-C]: AMAT Enabler chamber
[ETC380-02-D]: AMAT DPS2 Advantedge G5 chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC380-02.pdf |
| |
[ETC380-03]: AMAT Centura AP; 300mm AMAT Centura AP with 2 Load Locks and 2 Load Ports; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC380-03-A]: AMAT HART3 chamber
[ETC380-03-B]: AMAT HART3 chamber
[ETC380-03-C]: AMAT HART3 chamber
[ETC380-03-D]: AMAT HART3 chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC380-03.pdf |
| |
[ETC380-05]: AMAT Centura AP; 300mm AMAT Centura AP with 3 Load Ports; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC380-05-A]: AMAT eMax CT chamber
[ETC380-05-B]: AMAT Enabler chamber
[ETC380-05-C]: AMAT DPS2 Advantedge chamber
[ETC380-05-D]: AMAT Axiom strip chamber
| 2007 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC380-05.pdf |
| |
[ETC330-09]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4 with 2 Load Ports; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC330-09-A]: AMAT eMax CT chamber
[ETC330-09-B]: AMAT eMax CT chamber
[ETC330-09-C]: AMAT eMax CT plus chamber
[ETC330-09-D]: AMAT eMax CT plus chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC330-09.pdf |
| |
[ETC340-01]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4 with 2 Load Ports and 2 side pods ; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC340-01-A]: AMAT DPS2 CIP1 chamber
[ETC340-01-B]: AMAT DPS2 CIP1 chamber
[ETC340-01-C]: AMAT DPS2 CIP1 chamber
[ETC340-01-D]: AMAT DPS2 CIP1 chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC340-01.pdf |
| |
[ETC340-03]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4 with 2 Load Ports and 2 side pods ; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC340-03-A]: AMAT DPS2 chamber
[ETC340-03-B]: AMAT DPS2 chamber
[ETC340-03-C]: AMAT DPS2 chamber
[ETC340-03-D]: AMAT DPS2 chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC340-03.pdf |
| |
[ETC320-01]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4;
with 2 Load Locks and 2 Load Ports; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC320-01-A]: AMAT HART3 chamber
[ETC320-01-B]: AMAT HART3 chamber
[ETC320-01-C]: AMAT HART3 chamber
[ETC320-01-D]: AMAT HART3 chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC320-01.pdf |
| |
[ETC320-02]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4;
with 2 Load Locks and 2 Load Ports; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC320-02-A]: AMAT HART3 chamber
[ETC320-02-B]: AMAT HART3 chamber
[ETC320-02-C]: AMAT HART3 chamber
[ETC320-02-D]: AMAT HART3 chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC320-02.pdf |
| |
[ETC330-02]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4 with 2 Load Ports; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC330-02-A]: AMAT eMax rev.2 chamber
[ETC330-02-B]: AMAT eMax CT3 chamber
[ETC330-02-C]: AMAT eMax CT3 chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC330-02.pdf |
| |
[ETC330-03]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4 with 2 Load Ports; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC330-03-A]: AMAT eMax CT plus chamber
[ETC330-03-B]: AMAT eMax CT plus chamber
[ETC330-03-C]: AMAT eMax CT plus chamber
[ETC330-03-D]: AMAT eMax CT plus chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC330-03.pdf |
| |
[ETC330-06]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4 with 2 Load Ports and 2 side storage pods; Weight: 1998 kg; Dimension: 1676x2450x2490 mm.
[ETC330-06-A]: AMAT eMax CT chamber
[ETC330-06-B]: AMAT eMax CT chamber
[ETC330-06-C]: AMAT eMax CT chamber
[ETC330-06-D]: AMAT eMax CT chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC330-06.pdf |
| |
[ETC340-05]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4 with 2 Load Ports and 2 side pods ; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC340-05-A]: AMAT DPS2 CIP1 chamber
[ETC340-05-B]: AMAT DPS2 CIP1 chamber
[ETC340-05-C]: AMAT DPS2 CIP1 chamber
[ETC340-05-D]: AMAT DPS2 CIP1 chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC340-05.pdf |
| |
[ETC340-02]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4 with 2 Load Ports and 2 side pods ; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC340-02-A]: AMAT DPS2 chamber
[ETC340-02-B]: AMAT DPS2 chamber
[ETC340-02-C]: AMAT DPS2 chamber
[ETC340-02-D]: AMAT DPS2 AdvantEdge G5 chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC340-02.pdf |
| |
[ETC330-01]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4; with 2 Load Ports; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC330-01-A]: AMAT eMax CT chamber
[ETC330-01-B]: AMAT eMax CT chamber
[ETC330-01-C]: AMAT eMax CT chamber
[ETC330-01-D]: AMAT eMax CT chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC330-01.pdf |
| |
[ETC340-06]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4 with 2 Load Ports and 2 side pods ; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC340-06-A]: AMAT DPS2 CIP1 chamber
[ETC340-06-B]: AMAT DPS2 chamber
[ETC340-06-C]: AMAT DPS2 chamber
[ETC340-06-D]: AMAT DPS2 chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC340-06.pdf |
| |
[ETC340-04]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4 with 2 Load Ports and 2 side pods ; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC340-04-A]: AMAT DPS2 CIP1 chamber
[ETC340-04-B]: AMAT DPS2 CIP1 chamber
[ETC340-04-C]: AMAT DPS2 CIP1 chamber
[ETC340-04-D]: AMAT DPS2 CIP1 chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC340-04.pdf |
| |
[ETC320-05]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4;
with 2 Load Locks and 2 Load Ports; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC320-05-A]: AMAT HART3 chamber
[ETC320-05-B]: AMAT HART3 chamber
[ETC320-05-C]: AMAT HART3 chamber
[ETC320-05-D]: AMAT HART3 chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC320-05.pdf |
| |
[ETC340-07]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4 with 2 Load Ports and 2 side pods ; Weight: 1998 kg; Dimension: 1676x2450x2490 mm.
[ETC340-07-A]: AMAT DPS2 CIP1 chamber
[ETC340-07-B]: AMAT DPS2 CIP1 chamber
[ETC340-07-C]: AMAT DPS2 CIP1 chamber
[ETC340-07-D]: AMAT DPS2 CIP1 chamber
| 2003 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC340-07.pdf |
| |
[ETC320-06]: AMAT Centura Rev.4; 300mm AMAT Centura Rev.4;
with 2 Load Locks and 2 Load Ports; Weight: 2064 kg; Dimension: 1676x2450x2490 mm.
[ETC320-06-A]: AMAT HART3 chamber
[ETC320-06-B]: AMAT HART3 chamber
[ETC320-06-C]: AMAT HART3 chamber
[ETC320-06-D]: AMAT HART3 chamber
| 2001 | Applied Materials | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/ETC320-06.pdf |
| |
[CVD305-03]: AMAT Centura Rev.4 Poly/ WSix ; AMAT Centura Mainframe; Weight: kg; Dimension: mm.
[CVD305-03-A]: POLYGen 300 chamber
[CVD305-03-B]: POLYGen 300 chamber
[CVD305-03-C]: DCSxZ 300 chamber
[CVD305-03-D]: DCSxZ 300 chamber
| 2001 | AMAT | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CVD305-03.pdf |
| |
[MES319-02]: AMAT COMPASS PRO; 1Darkfield-Defectinspection-Tool AMAT Compass Pro, 2Loadports Asyst 300FL,S2.1 HAMA / 9700-6149-01 Rev.A
wafer ID reader (back side)
WS: SunUltra 5/10 UPA/PCI (Ultra Sparc-Iii 440MHz) 1024MB RAM
NT1: x86 Family 6 Model 6 Stepping 5, 228MB RAM
NT2: x86 Family 6 Model 6 Stepping 5, 228MB RAM
NT3 (FI): x86 Family 6 Model 8 Stepping 3, 130MB RAM
WS: SunOS Release 5.7, Unix System release 4.0, Solaris Open Windows ver. 3.6.1
SW Version v4.6 Patches installed: 280, 281, 282, 284, 285, 299, 311, 312, 338, 389, 491
NT1: Win NT 4.00.1381
NT2: Win NT 4.00.1381
NT3 (FI): Win NT 4.00.1381
Scan Objectives: 1x, 3x, 5x, 10x
Review Objectives: 2.5x, 5x, 20x, 50x, 150x
diode pump pack of laser: approx. 20.000h livetime, 12 W optical power output
2 W optical output power of laser head
some 100 nW optical power on wafer, depents on recipe
laser power reduction via lambda/2 plate
2x E84 optical interface to OHT
FOUP ID reader: yes (Hermos)
Wafer ID reader: yes (back side)
prealigner: Asyst, Model 5
robot: Asyst, Model 12000-004 with teach pendent
| 2001 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES319-02_.pdf |
| |
[MES319-03]: AMAT COMPASS PRO; 1Darkfield-Defectinspection-Tool AMAT Compass Pro, 2Loadports Asyst 300FL,S2.1 HAMA / 9700-6149-01 Rev.A, E84
wafer ID reader
WS: SunUltra 5/10 UPA/PCI (Ultra Sparc-Iii 440MHz) 512MB RAM
NT1: x86 Family 6 Model 6 Stepping 5, 228MB RAM
NT2: x86 Family 6 Model 6 Stepping 5, 228MB RAM
NT3 (FI): x86 Family 6 Model 8 Stepping 1, 130MB RAM
WS: SunOS Release 5.7, Unix System V release 4.0, Solaris Open Windows ver. 3.6.1
SW Version v4.6 Patches installed: 280, 281, 282, 284, 285, 299, 311, 312, 338, 389, 491
NT1: Win NT 4.00.1381
NT2: Win NT 4.00.1381
NT3 (FI): Win NT 4.00.1381
Scan Objectives: 1x, 3x, 5x, 8x
Review Objectives: 2.5x, 5x, 20x, 50x, 150x
no ionizer bar2x E84 optical interface to OHT
FOUP ID reader: yes (Hermos)
Wafer ID reader: yes (back side)
prealigner: Asyst, Model 05050-044
robot: Asyst, Model 12000-004 with teach pendent
| 2001 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES319-03_.pdf |
| |
[MES319-04]: AMAT COMPASS PRO; 1Darkfield-Defectinspection-Tool AMAT Compass Pro, 2Loadports Asyst 300FL,S2.1 HAMA / 9700-6149-01 Rev.A, E84
WS: SunUltra 5/10 UPA/PCI (Ultra Sparc-Iii 440MHz) 512MB RAM
NT1: x86 Family 6 Model 6 Stepping 5, 228MB RAM
NT2: x86 Family 6 Model 6 Stepping 5, 228MB RAM
NT3 (FI): x86 Family 6 Model 8 Stepping 1, 130MB RAM
WS: SunOS Release 5.7, Unix System V release 4.0, Solaris Open Windows ver. 3.6.1
SW Version v4.6 Patches installed: 280, 281, 282, 284, 285, 299, 311, 312, 338, 389, 491
NT1: Win NT 4.00.1381
NT2: Win NT 4.00.1381
NT3 (FI): Win NT 4.00.1381
Scan Objectives: 1x, 3x, 5x, 8x
Review Objectives: 2.5x, 5x, 20x, 50x, 150x
2x E84 optical interface to OHT
FOUP ID reader: yes (Hermos)
Wafer ID reader: yes (back side)
prealigner: Asyst, Model 5
robot: Asyst, Model 12000-004 with teach pendent
no ionizer bar
| 2001 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES319-04_.pdf |
| |
[MES319-05]: AMAT COMPASS PRO; 1Darkfield-Defectinspection-Tool AMAT Compass Pro, 2Loadports Asyst 300FL,S2.1 HAMA / 9700-6149-01 Rev.A
no wafer ID reader
WS: SunUltra 5/10 UPA/PCI (Ultra Sparc-Iii 440MHz) 512MB RAM
NT1: x86 Family 6 Model 6 Stepping 5, 228MB RAM
NT2: x86 Family 6 Model 6 Stepping 5, 228MB RAM
NT3 (FI): x86 Family 6 Model 8 Stepping 3, 130MB RAM
WS: SunOS Release 5.7, Unix System release 4.0, Solaris Open Windows ver. 3.6.1
SW Version v4.6 Patches installed: 280, 281, 282, 284, 285, 299, 311, 312, 338, 389, 491
NT1: Win NT 4.00.1381
NT2: Win NT 4.00.1381
NT3 (FI): Win NT 4.00.1381
Scan Objectives: 1x, 3x, 5x, 8x
Review Objectives: 2.5x, 5x, 20x, 50x, 150x
with clean cups for all stage air bearings to reduce particle contamination
| 2002 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES319-05_.pdf |
| |
[MES319-06]: AMAT COMPLUS MP3T; 1Darkfield-Defectinspection-Tool AMAT Complus MP3T, 2Loadport Asyst 300FL,S2.1 HAMA / 9700-6149-01 Rev.A
Upgrade 2T -->3T in April 2007
WS: SunUltra 5/10 UPA/PCI (Ultra Sparc-Iii 440MHz) 1024MB RAM, HDD: 2x 40 GB
NT1 (AF): x86 Family 6 Model 6 Stepping 5, 228MB RAM
NT2 (FI): x86 Family 6 Model 8 Stepping 6, 130MB RAM
NT3 (DP): Intel Pentium III CPU-S (1000MHz) / 500MB RAM
NT4 (IA): Intel Pentium III CPU-S (1000MHz) / 500MB RAM
WS: SunOS Release 5.7, Unix System V release 4.0, Solaris Open Windows ver. 3.6.1
SW Version v9.5 Patches installed: 490, 493
NT1 (AF): Win NT 4.00.1381 / NT2 (FI): Win NT 4.00.1381
NT3 (DP): Win XP prof v.2002 SP1 / NT4 (IA): Win XP prof v.2002 SP1
Scan Objectives: GF20T, GF20, GF30T, GF30, GF35, GF35T, GF40, GF40T
Review Objectives: 2.5x, 5x, 20x, 50x, 150x2x E84 optical interface to OHT
FOUP ID reader: yes (Hermos)
Wafer ID reader: yes (back side)
prealigner: Asyst, Model 5
robot: Asyst, Model 21 with teach pendent
| 2004 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES319-06_.pdf |
| |
[MES319-07]: AMAT COMPLUS MP3T; 1Darkfield-Defectinspection-Tool AMAT Complus MP3T, 2Loadports Asyst SMIF 300FL,S3 25WFR / 9750-2000-00 Rev.A
Complus upgrade MP2 -->MP3 (May 2007)
WS: SunUltra 5/10 UPA/PCI (Ultra Sparc-Iii 440MHz) 1024MB RAM, HDD: 1x 80GB 1x 20GB
NT1 (AF): x86 Family 6 Model 6 Stepping 5, 228MB RAM
NT2 (FI): x86 Family 6 Model 8 Stepping 6, 130MB RAM
NT3 (IP2): Intel Pentium III CPU-S (1000MHz) / 500MB RAM
NT4 (IP1): Intel Pentium III CPU-S (1000MHz) / 500MB RAM
WS: SunOS Release 5.7, Unix System V release 4.0, Solaris Open Windows ver. 3.6.1
SW Version v9.5 Patches installed: 490, 493
NT1 (AF): Win NT 4.00.1381 / NT2 (FI): Win NT 4.00.1381
NT3 (IP2): Win XP prof v.2002 SP1 / NT4 (IP1): Win XP prof v.2002 SP1
Scan Objectives: GF20T, GF20, GF30T, GF30, GF35, GF35T, GF40, GF40T
Review Objectives: 2.5x, 5x, 20x, 50x, 150x2x E84 optical interface to OHT
FOUP ID reader: yes (Hermos)
Wafer ID reader: yes (back side)
prealigner: Asyst, Model 5
robot: Asyst, Model 21 with teach pendent
| 2005 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES319-07_.pdf |
| |
[MES319-08]: AMAT COMPLUS MP4T; 1Darkfield-Defectinspection-Tool AMAT Complus MP4T, 2 loadport´s TDK Mod: TAS300 MFGNO: 02TF10295
Workstation: SunUltra 5/10 UPA/PCI (Ultra Sparc-Iii 360MHz) 1024MB RAM, HDD: 2x 80 GB
NT1 (NT1): x86 Family 6 Model 6 Stepping 5 / 228MB RAM
NT2 (DP): Intel Pentium III CPU-S (933MHz) / 500MB RAM
NT3 (IA): Intel Pentium III CPU-S (1000MHz) / 500MB RAM
WS: SunOS Release 5.7, Unix System V release 4.0, Solaris Open Windows ver. 3.6.1
SW Version v10.5 Patches installed: 490, 492, 493, 508
NT1 (NT1): Win NT 4.00.1381
NT2 (DP): Win XP prof v.2002 SP1
NT3 (IA): Win XP prof v.2002 SP1
upgrade MP2 -->MP3 (AMD-Fab)
upgrade MP3 -->MP4 in 2008
Scan Objectives: GF20T, GF20, GF30T, GF30, GF35, GF35T, GF40, GF40T
Review Objectives: 2.5x, 5x, 20x, 50x, 150x2x E84 optical interface to OHT
FOUP ID reader: yes (Hermos)
Wafer ID reader: yes (back side)
prealigner: Yaskawa
robot: Yaskawa, Typ XU-R6400M-B03 (two endeffectors) with teach pendent
| 2006 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES319-08_.pdf |
| |
[CMP310-01]: AMAT INFLEXION; bevel polish cluster (3 polish modules, Desica cleaner, FI); Applied Materials, InflexionTM, polish module 1 and 2, meg and clean station 1 used for standard CL0/2 applications
polish module 3 and clean station 2 used for Ruthenium (Cl5) ; Weight: 4733 kg; Dimension: 4240 x 2350 x 2500 mm.
| 2007 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP310-01.pdf |
| |
[MES333-04]: AMAT NANOSEM 3D; 1 AMAT Nano CD-SEM3D with speed upgrade (FUEL Workstation of Silicon Graphics in year 2007), Makro-CD, 200mm and 300mm capable
3 loadport´s ADO, 25 slots, 12 inch, F/W: ADO 0 0 0 20.92
DMD autofocus sensor
z-stage with ring support for 300mm wafers
FUEL-Workstation, 700 Mhz, IP35 Processor, 2GB RAM, Graphics Board V12
UPS: Powerware PLUS 18, S/N: FS265A0008
NanoSEM (upgraded from VeraSEM to NanoSEM)
IP with MacroCD
Workstation: UNIX IRIX 6.5
Application: 14.3.2CR
IP: XP SP1, Appl.Version 11.7.0.1
WHC: NT 4.00.1381, Globals Server Appl.Ver11.7.0.1, WsON_WHC: Ver14.3.2
MEC: NT 4.00.1381, Globals Server Appl. Ver.11.7.0.1, NT Stage Module Server Appl. Ver.11.6.0.9,
ws ON_OM_Controller, Appl. VeraSem-3D, Ver.12.7.0.6
Online Manuals: User Manual Verity SEM2, Jan2006, SW-Ver.14.2.0, P/N 0230-A5432
| 2001 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-04_.pdf |
| |
[MES333-03]: AMAT NANOSEM 3D; 1 AMAT Nano CD-SEM3D with speed upgrade (FUEL Workstation of Silicon Graphics in year 2007), Makro-CD, 200mm and 300mm capable;
Application: 14.3.2CR
3 loadport´s ADO, 25 slots, 12 inch, F/W: ADO 0 0 0 20.92
DMD autofocus sensor
z-stage with 3 wafer pins
FUEL-Workstation, 700 Mhz, IP35 Processor, 2GB RAM, Graphics Board V12
UPS: Powerware Plus18 (FT332A0002)
IP with MacroCD (speed upgrade)
IP: XP SP1, Appl.Version 11.7.0.1
WHC: NT 4.00.1381, Appl.ID: Ver4.1.200, Globals Server Appl.Ver11.7.0.1, WsON_WHC: Ver14.3.2
MEC: NT 4.00.1381, Globals Server Appl. Ver.11.7.0.1, NT Stage Module Server Appl. Ver.11.6.0.9,
ws ON_OM_Controller, Appl. VeraSem-3D, Ver.12.7.0.6
Licenses: +Slope reconstruction, +CH Analysis, +Profile Grade, +Discrete Inspection, +Defect Review, +ARAMS (E58),
+Process Window Analyser, +Enhanced Digital Image, +RTCA, +MacroCD, +Roughness Analysis, +M3 Support
+ArF Mode, +Syntetic PR,
optional: 2x EDWARDS dry pumpsOption: Offline Workstation OCTANE from Silicon Graphics with SW Ver 14.3.2
| 2001 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-03_.pdf |
| |
[MES333-09]: AMAT NANOSEM 3D; 1 AMAT Nano CD-SEM3D with speed upgrade (FUEL Workstation of Silicon Graphics in year 2007), Makro-CD, 200mm and 300mm capable
3 loadport´s ADO, 25 slots, 12 inch, F/W: ADO 0 0 0 20.92
DMD autofocus sensor
z-stage with 3 wafer pins
UPS: Powerware, battery change 25.07.07
FUEL-Workstation, 700 Mhz, IP35 Processor, 2GB RAM, Graphics Board V12
IP with MacroCD
tool was upgraded from VeraSEM to NanoSEM
Workstation: UNIX IRIX 6.5
Application: 14.3.2CR
IP: XP SP1, Appl.Version 11.7.0.1
WHC: NT 4.00.1381, Globals Server Appl.Ver11.7.0.1, WsON_WHC: Ver14.3.2
MEC: NT 4.00.1381, Globals Server Appl. Ver.11.7.0.1, NT Stage Module Server Appl. Ver.11.6.0.9,
ws ON_OM_Controller, Appl. VeraSem-3D, Ver.12.7.0.6Online Manals: User Manual Verity SEM2, Jan2006, SW-Ver.14.2.0, P/N 0230-A5432
| 2002 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-09_.pdf |
| |
[MES333-10]: AMAT NANOSEM 3D; 1 AMAT Nano CD-SEM3D with speed upgrade (FUEL Workstation of Silicon Graphics in year 2007), Makro-CD, 200mm and 300mm capable
3 loadport´s ADO, 25 slots, 12 inch, F/W: ADO 0 0 0 20.92
DMD autofocus sensor
z-stage with 3 wafer pins
UPS: Powerware PLUS 18, S/N: FU032A0006
FUEL-Workstation, 700 Mhz, IP35 Processor, 1GB RAM, Graphics Board V12
IP with MacroCD
Workstation: UNIX IRIX 6.5 ,, Application: 14.3.2CR
IP: XP SP1, Appl.Version 11.7.0.1
WHC: NT 4.00.1381, Globals Server Appl.Ver11.7.0.1, WsON_WHC: Ver14.3.2
MEC: NT 4.00.1381, Globals Server Appl. Ver.11.7.0.1, NT Stage Module Server Appl. Ver.11.6.0.9,
ws ON_OM_Controller, Appl. VeraSem-3D, Ver.12.7.0.6
Online Manuals: User Manual Verity SEM2, Jan2006, SW-Ver.14.2.0, P/N 0230-A5432Licenses: +Slope reconstruction, +CH Analysis, +Profile Grade, +Discrete Inspection, +Defect Review, +ARAMS (E58),
+Process Window Analyser, +Enhanced Digital Image, +RTCA, +MacroCD, +Roughness Analysis, +M3 Support
+ArF Mode, +Syntetic PR,
| 2002 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-10_.pdf |
| |
[MES333-11]: AMAT NANOSEM 3D; 1 AMAT Nano CD-SEM3D with speed upgrade (FUEL Workstation of Silicon Graphics in year 2007), Makro-CD, 200mm and 300mm capable
3 loadport´s TDK, Model: TAS300, 25 slots, 12 inch, F/W: TDK 0 FE 3.36.0
DMD autofocus sensor
IP with MacroCD
z-stage with three wafer pins
chuck with three wafer pins
UPS: Powerware 9330 C, Model 17, S/N: EV242Axx11, last battery change: 18.07.07
Workstation: FUEL (Silicon Graphics), 700 MHz, IP35 Processor, 2 GB RAM, Graphics board V12
Workstation: UNIX IRIX 6.5, , Application: 14.3.2CR
IP: XP SP1, Appl.Version 11.7.0.1
WHC: NT 4.00.1381, Globals Server Appl.Ver11.7.0.1, WsON_WHC: Ver14.3.2
MEC: NT 4.00.1381, Globals Server Appl. Ver.11.7.0.1, NT Stage Module Server Appl. Ver.11.6.0.9,
ws ON_OM_Controller, Appl. VeraSem-3D, Ver.12.7.0.6Online Manals: User Manual Verity SEM2, Jan2006, SW-Ver.14.2.0, P/N 0230-A5432
| 2001 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-11_.pdf |
| |
[CMP303-02]: AMAT RELEXION; CMP cluster (polish modul, cleaner modul, FI), Applied Materials ReflexionTM, upgraded with 5 zone pressure control heads (ContourTM), ISRMTM
and with integrated metrology system NOVA scan 3030 wet (SWR: 4.5r2b29)Oxide CMP using Klebosol 30N50 slurry ; Weight: 4366 kg; Dimension: 3050 x 2690 x 2900 mm.
| 2001 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP303-02.pdf |
| |
[CMP305-01]: AMAT RELEXION; CMP cluster (polish modul, cleaner modul, FI), Applied Materials ReflexionTM, upgraded with 5 zone pressure control heads (ContourTM), ISRMTM
and with integrated metrology system NOVA scan 3030 wet (SWR: 4.5r2b29)Oxide CMP using Klebosol 30N50 slurry ; Weight: 4366 kg; Dimension: 3050 x 2690 x 2900 mm.
| 2000 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP305-01.pdf |
| |
[CMP305-02]: AMAT RELEXION; CMP cluster (polish modul, cleaner modul, FI), Applied Materials ReflexionTM, upgraded with 5 zone pressure control heads (ContourTM), ISRMTM
and with integrated metrology system NOVA scan 3030 wet (SWR: 4.5r2b29)Oxide CMP using Klebosol 30N50 slurry ; Weight: 4366 kg; Dimension: 3050 x 2690 x 2900 mm.
| 2000 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP305-02.pdf |
| |
[CMP303-03]: AMAT RELEXION; CMP cluster (polish modul, cleaner modul, FI), Applied Materials ReflexionTM, upgraded with 5 zone pressure control heads (ContourTM), ISRMTM
and with integrated metrology system NOVA scan 3030 wet (SWR: 4.5r2b29)Oxide CMP using Klebosol 30N50 slurry ; Weight: 4366 kg; Dimension: 3050 x 2690 x 2900 mm.
| 2001 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP303-03.pdf |
| |
[CMP303-05]: AMAT RELEXION; CMP cluster (polish modul, cleaner modul, FI), Applied Materials ReflexionTM, upgraded with 5 zone pressure control heads (ContourTM), ISRMTM
and with integrated metrology system NOVA scan 3030 wet (SWR: 4.5r2b29)Oxide CMP using Klebosol 30N50 slurry ; Weight: 4366 kg; Dimension: 3050 x 2690 x 2900 mm.
| 2000 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP303-05.pdf |
| |
[CMP303-04]: AMAT RELEXION; CMP cluster (polish modul, cleaner modul, FI), Applied Materials ReflexionTM, upgraded with 5 zone pressure control heads (ContourTM), ISRMTM and with integrated metrology system NOVA scan 3030 wet (SWR: 4.5r2b29)Oxide CMP using Klebosol 30N50 slurry ; Weight: 4366 kg; Dimension: 3050 x 2690 x 2900 mm.
| 2001 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP303-04.pdf |
| |
[CMP305-03]: AMAT RELEXION; CMP cluster (polish modul, cleaner modul, FI), Applied Materials ReflexionTM, upgraded with 5 zone pressure control heads (ContourTM), ISRMTM
and with integrated metrology system NOVA scan 3030 wet (SWR: 4.5r2b29)Oxide CMP using Klebosol 30N50 slurry ; Weight: 4366 kg; Dimension: 3050 x 2690 x 2900 mm.
| 2002 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP305-03.pdf |
| |
CMP cluster (polish modul, cleaner modul, FI), Applied Materials ReflexionTM, upgraded with 5 zone pressure control heads (ContourTM), ISRMTM
and with integrated metrology system NOVA scan 3060 wet (SWR: 4.5r2b29)Oxide CMP using Klebosol 30N50 slurry
| 2004 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP303-06.pdf |
| |
CMP cluster (polish modul, DesicaTM cleaner modul, FI), Applied Materials Reflexion LKTM, equipped with 5 zone pressure control heads (ContourTM), motor torque endpoint, ISRMTM and with integrated metrology system NOVA scan 3060 wet (SWR: 4.5r2b29) STI CMP using Hitachi ceria based slurry; Weight: 6583 kg; Dimension: 3050 x 2690 x 2900 mm.
| 2003 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP307-01.pdf |
| |
Scanning-Electron-Beam-Defectreview-Tool AMAT SEMVision CX, 2 loadport´s ADO, 25 slots, 12 inch,
45° tilt option
stage with ring support for 300mm wafers
prepared for EDX-detector, but not installed
Ver 5.0.100
| 2001 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES324-02_.pdf |
| |
[MES324-04]: AMAT SEM Vision G2 lite; 1Scanning-Electron-Beam-Defectreview-Tool AMAT SEMVision G2 HP, 2Loadport,
Ver 5.2.500
stage with ring support for 300mm wafers
| 2005 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES324-04_.pdf |
| |
[MES324-05]: AMAT SEM Vision G3 EDX; 1Scanning-Electron-Beam-Defectreview-Tool AMAT SEMVision G3 with EDX, 2 loadport´s ADO, 25 slots, 12 inch,
Workstation: FUEL (Silicon Graphics), 800 MHz, Processor IP35, 2 GB RAM, Graphics board V12
45° tilt option, EDX
no wafer ID reader
theta stage
e-chuck, ceramic, bipolar
Phantom Manager
Basic HW Configuration: G2 HP, ODC
UPS: Powerware 9330C M17, Input=Output=208V~, 3ph / next battery replacement 08/2009
option: two EDWARDS dry pumps
two external detectors, one internal detectorWorkstation: UNIX IRIX 6.5, Application GW: 5.2.500, MC: 5.2.500
IP: XP Professional 2002
WHC: NT 4.00.1381, Appl.: Globals Server wsON_WHC: 5.2.500.13.NPB
MEC: NT 4.00.1381, Application: Insight Microscope V5.2.500/FIB
| 2006 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES324-05_.pdf |
| |
[MES324-06]: AMAT SEM Vision G3 EDX FIB; 1Scanning-Electron-Beam-Defectreview-Tool AMAT SEMVision G3 with EDX & with FIB, 2Loadports TDK TAS300, 25 slots, 12 inch, 2 FOUP ID Reader: Hermos TLG-RS232, no wafer ID reader
two external detectors, one internal detector
Workstation: UNIX IRIX 6.5, Application GW: 5.2.500, MC: 5.0.100; Ver 5.2.500
MEC: x86 Family 6 Model 11, Stepping 4, 130MB RAM, 1xHDD 4GB
WHC: x86 Family 15 Model 2 Stepping 9, 1GB RAM, 1x HDD 4GB
IP: Intel Xeon CPU 2,4GHz, 768 MB RAM, 1x HDD 80 GB
EDX: Intel Celeron CPU, 2,5GHz, 512MB RAM
EDX: Application: Noran System SIX Version 1.8, Build 181
EDX: Noran System SIX with cryoTiger and PT-14 gas
height between GIS nossle and wafer: 700 µm, you cannot load a EDX-Calibration-Wafer
theta stage, e-chuck, ceramic, bipolar
DMD autofocus sensor
Phantom Manager
GIS-Configuration:
| 2006 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES324-06_.pdf |
| |
[MES333-05]: AMAT VERASEM; 1 AMAT Nano CD-SEM, 200mm and 300mm capable;
3 loadport´s ADO,
z-stage with 3 wafer pins
Octane-Workstation,
IP
WHC
MEC
optional: 2x EDWARDS dry pumps
| 2001 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-05_.pdf |
| |
[MES333-07]: AMAT VERASEM; 1 AMAT Nano CD-SEM, 200mm and 300mm capable;
3 loadport´s ADO,
z-stage with 3 wafer pins
Octane-Workstation,
IP
WHC
MEC
optional: 2x EDWARDS dry pumps
| 2001 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-07_.pdf |
| |
[MES333-06]: AMAT VERASEM; 1 AMAT Nano CD-SEM, 200mm and 300mm capable;
3 loadport´s ADO,
z-stage with 3 wafer pins
Octane-Workstation,
IP
WHC
MEC
optional: 2x EDWARDS dry pumps
| 2001 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-06_.pdf |
| |
[MES333-21]: AMAT VERITY 4i; 1 AMAT Verity 4i CD-SEM, 200mm and 300mm capable
operator console
3 loadport´s TDK TAS300, 25 slots, 12 inch,
DMD autofocus sensor
MacroCD
e-chuck: bipolar, ceramic,
z-stage
Workstation: DELL , AMAT-Part-Nr. 0090-A4801, Windows XP
UPS: Eaton, Model 9355-F47 Unirom, Input 208V,3ph, Output 208V,3ph, 50Hz, no batt change
Application: Ver: SEMurai_Ver_2.0.430, Build: 03.02.09,
UHV: Firmware 4.2.1 / 4.0
e-chuck: FPGA 0.0 Micro 1.9 Board 0.0
internal recipe database
Online Manals: A quick tour of Application Workplace
Working in Manual Operation Mode
| 2007 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-21_.pdf |
| |
[MES333-12]: AMAT VERITY I; 1 AMAT Verity CD-SEM with speed upgrade (ODC Computer), Makro-CD, 200mm and 300mm capable;
3 loadport´s TDK TAS300, 25 slots, 12 inch, F/W: TDK OFE 3.36.0
DMD autofocus sensor
ODC computer with MacroCD
e-chuck: bipolar, ceramic
z-stage with brakets and 5000V-trap to reduce particle contamination
UPS: Model 18/18, Input 208V,3ph, Output 208V, 3ph, 25.07.07 last batt change
Workstation: FUEL (Silicon Graphics), 700 MHz, IP35, 2 GB RAM, Graphics board V12
---> it was our MASTER-Tool
Workstation: UNIX IRIX 6.5, , Application: 14.3.2CR
IP: XP SP1, Appl.Version 11.7.0.1
ODC: XP 2002 Professional
WHC: NT 4.00.1381, Globals Server Appl.Ver11.7.0.1, WsON_WHC: Ver14.3.2
MEC: NT 4.00.1381, Globals Server Appl. Ver.11.7.0.1, NT Stage Module Server Appl. Ver.11.6.0.9,
ws ON_OM_Controller, Appl. VeraSem-3D, Ver.12.7.0.6
e-chuck controller: firmeware 2.3Online Manals: User Manual Verity SEM2, Jan2006, SW-Ver.14.2.0, P/N 0230-A5432
| 2003 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-12_.pdf |
| |
[MES333-13]: AMAT VERITY I; 1 AMAT Verity CD-SEM with speed upgrade (ODC Computer), Makro-CD, 200mm and 300mm capable
3 loadport´s TDK TAS300, 25 slots, 12 inch, F/W: TDK OFE 3.36.0
DMD autofocus sensor
ODC computer with MacroCD
e-chuck: bipolar, ceramic
z-stage with brakets and 5000V-trap to reduce particle contamination
UPS: Powerware PW9330-17, S/N: EW221AX, last battery change: 18.07.2007
Workstation: FUEL (Silicon Graphics), 700 MHz, IP35, 2 GB RAM, Graphics board V12
Workstation: UNIX IRIX 6.5, , Application: 14.3.2CR
IP: XP SP1, Appl.Version 11.7.0.1
ODC: XP 2002 Professional
WHC: NT 4.00.1381, Globals Server Appl.Ver11.7.0.1, WsON_WHC: Ver14.3.2
MEC: NT 4.00.1381, Globals Server Appl. Ver.11.7.0.1, NT Stage Module Server Appl. Ver.11.6.0.9,
ws ON_OM_Controller, Appl. VeraSem-3D, Ver.12.7.0.6
e-chuck controller: firmeware 2.3
Online Manals: User Manual Verity SEM2, Jan2006, SW-Ver.14.2.0, P/N 0230-A5432
| 2004 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-13_.pdf |
| |
[MES333-14]: AMAT VERITY I; 1 AMAT Verity CD-SEM with speed upgrade (ODC Computer), Makro-CD, 200mm and 300mm capable
speedupgrade waferhandling with other pump setting points for higher wafer-troughput
Wafer ID reader
3 loadport´s TDK TAS300, 25 slots, 12 inch, F/W: TDK OFE 4.00.0
DMD autofocus sensor
ODC computer with MacroCD
e-chuck: bipolar, ceramic
z-stage with brakets and 5000V-trap to reduce particle contamination
UPS: Powerware 17, S/N: EX103AXX09, last battery change: no, original set, Input: 208V-3ph
UPS has a transformer: input 400V-3ph output 208V-3ph
Workstation: FUEL (Silicon Graphics), 700 MHz, IP35, 2 GB RAM, Graphics board V12
Workstation: UNIX IRIX 6.5, , Application: 14.3.2CR
IP: XP SP1, Appl.Version 11.7.0.1
ODC: XP 2002 Professional
WHC: NT 4.00.1381, Globals Server Appl.Ver11.7.0.1, WsON_WHC: Ver14.3.2
MEC: NT 4.00.1381, Globals Server Appl. Ver.11.7.0.1, NT Stage Module Server Appl. Ver.11.6.0.9,
ws ON_OM_Controller, Appl. VeraSem-3D, Ver.12.7.0.6e-chuck controller: firmeware 2.3
Online Manals: User Manual Verity SEM2, Jan2006, SW-Ver.14.2.0, P/N 0230-A5432
| 2005 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-14.pdf |
| |
AMAT VERITY I; CD-SEM with speed upgrade (ODC Computer), Makro-CD, 200mm and 300mm capable;
3 loadport´s TDK TAS300, 25 slots, 12 inch, F/W: TDK OFE 4.00.0
UPS: Powerware 9330D, orginal batteries
UPS: with transformator ! --> Input 400V,3ph, Output 208V,3ph
z-stage with brakets and 5000V-trap to reduce particle contamination
DMD autofocus sensor
e-chuck: bipolar, ceramic
z-stage with brakets and 5000V-trap to reduce particle contamination
Workstation: FUEL (Silicon Graphics), 700 MHz, IP35, 2 GB RAM, Graphics board V12
Workstation: UNIX IRIX 6.5, , Application: 14.3.2CR
IP: XP SP1, Appl.Version 11.7.0.1
ODC: XP 2002 Professional
WHC: NT 4.00.1381, Globals Server Appl.Ver11.7.0.1, WsON_WHC: Ver14.3.2
MEC: NT 4.00.1381, Globals Server Appl. Ver.11.7.0.1, NT Stage Module Server Appl. Ver.11.6.0.9,
ws ON_OM_Controller, Appl. VeraSem-3D, Ver.12.7.0.6
e-chuck controller: firmeware 2.3
| 2006 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-15_.pdf |
| |
[MES333-16]: AMAT VERITY I; 1 AMAT Verity CD-SEM with speed upgrade (ODC Computer), Makro-CD, 200mm and 300mm capable
3 loadport´s TDK TAS300, 25 slots, 12 inch, F/W: TDK OFE 4.00.0
DMD autofocus sensor
ODC computer with MacroCD
e-chuck: bipolar, ceramic, new type with ring support to minimize the risk of wafer jumps
z-stage with brakets and 5000V-trap to reduce particle contamination
UPS: Powerware 9355-15, S/N: FY462JBA21, last battery change: no, original set
Workstation: FUEL (Silicon Graphics), 700 MHz, IP35, 2 GB RAM, Graphics board V12
Workstation: UNIX IRIX 6.5, Application: 14.3.2CR
IP: XP SP1, Appl.Version 11.7.0.1
ODC: XP 2002 Professional
WHC: NT 4.00.1381, Globals Server Appl.Ver11.7.0.1, WsON_WHC: Ver14.3.2
MEC: NT 4.00.1381, Globals Server Appl. Ver.11.7.0.1, NT Stage Module Server Appl. Ver.11.6.0.9,
ws ON_OM_Controller, Appl. VeraSem-3D, Ver.12.7.0.6
e-chuck controller: firmeware 2.3Online Manuals: User Manual Verity SEM2, Jan2006, SW-Ver.14.2.0, P/N 0230-A5432
| 2007 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-16_.pdf |
| |
[MES333-17]: AMAT VERITY II; 1 AMAT Verity CD-SEM with speed upgrade (ODC Computer), Makro-CD, 200mm and 300mm capable;
UPS: Powerware 9355-F47 Unirom, S/N: FY251JBA05, orginal batteries
3 loadport´s TDK TAS300, 25 slots, 12 inch, F/W: TDK OFE 4.00.0
DMD autofocus sensor
ODC computer with MacroCD
e-chuck: bipolar, ceramic
z-stage with brakets and 5000V-trap to reduce particle contamination
Workstation: FUEL (Silicon Graphics), 700 MHz, IP35, 2 GB RAM, Graphics board V12
Workstation: UNIX IRIX 6.5, Application: 14.3.2CR
IP: XP SP1, Appl.Version 11.7.0.1
ODC: XP 2002 Professional
WHC: NT 4.00.1381, Globals Server Appl.Ver11.7.0.1, WsON_WHC: Ver14.3.2
MEC: NT 4.00.1381, Globals Server Appl. Ver.11.7.0.1, NT Stage Module Server Appl. Ver.11.6.0.9,
ws ON_OM_Controller, Appl. VeraSem-3D, Ver.12.7.0.6e-chuck controller: firmeware 2.3
Online Manals: User Manual Verity SEM2, Jan2006, SW-Ver.14.2.0, P/N 0230-A5432
| 2006 | APPLIED MATERIALS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES333-17_.pdf |
| |
[SPU321-01]: Anelva C-7100EX; Canon Anelva PVD Mainframe; Weight: kg; Dimension: mm.
[SPU321-01-A]: Preclean Chamber
[SPU321-01-E]: PCM-X Chamber
[SPU321-01-F]: PCM-X Chamber
[SPU321-01-J]: Degas Chamber -->additional information see PDF file
| 2007 | Canon Anelva | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/SPU321-01.pdf |
| |
[CVD301-10]: APFx Producer GT CHM APFx ; AMAT Producer GT Mainframe; Weight: 4978 kg; Dimension: 3315x2242x2515 mm.
[CVD301-10-B]: APF Twin chamber
[CVD301-10-C]: APF Twin chamber
| | AMAT | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CVD301-10.pdf |
| |
[FOT360-03]: ASML AT1100; ASML exposure tool (Scanner, 193nm wavelength); Weight: 18285 kg; Dimension: 2020 x 2850 x 5201 mm.
CYMER NANOLITH7600
| 2002 | ASML | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT360-03.pdf |
| |
[FOT360-04]: ASML AT1200; ASML exposure tool (Scanner, 193nm wavelength); Weight: 18286 kg; Dimension: 2020 x 2850 x 5202 mm.
CYMER XLA165
| 2003 | ASML | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT360-04.pdf |
| |
[FOT360-05]: ASML AT1250; ASML exposure tool (Scanner, 193nm wavelength); Weight: 18286 kg; Dimension: 2020 x 2850 x 5202 mm.
CYMER XLA165
| 2004 | ASML | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT360-05.pdf |
| |
[FOT340-03]: ASML AT750; ASML exposure tool (Scanner, 248nm wavelength); Weight: 18285 kg; Dimension: 2020 x 2850 x 5200 mm.
CYMER ELS6600
| 2001 | ASML | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT340-03.pdf |
| |
[FOT340-04]: ASML AT750; ASML exposure tool (Scanner, 248nm wavelength); Weight: 18285 kg; Dimension: 2020 x 2850 x 5200 mm.
CYMER ELS6600
| 2002 | ASML | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT340-04.pdf |
| |
[FOT360-07]: ASML XT1400F; ASML exposure tool (Scanner, 193nm wavelength); Weight: 18286 kg; Dimension: 2020 x 2850 x 5202 mm.
GIGAPHOTON GT40
| 2006 | ASML | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT360-07.pdf |
| |
[CVD304-04]: Aviza Celsior mainframe; Aviza Celsior Mainframe; Weight: 1400 kg; Dimension: 2100x3340x2640 mm.
[CVD304-04-C]: Aviza Celsior ALD chamber
[CVD304-04-D]: Aviza Celsior ALD chamber
| 2005 | AVIZA | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CVD304-04.pdf |
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[CVD304-02]: Aviza Pantheon Mainframe; Aviza Pantheon Mainframe; Weight: 1400 kg; Dimension: 2100x3340x2640 mm.
[CVD304-02-C]: Aviza Pantheon ALD chamber
[CVD304-02-E]: Aviza Pantheon ALD chamber
| 2004 | AVIZA | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CVD304-02.pdf |
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[CVD304-03]: Aviza Pantheon Mainframe; Aviza Pantheon Mainframe; Weight: 1400 kg; Dimension: 2100x3340x2640 mm.
[CVD304-03-B]: Aviza Pantheon ALD chamber
[CVD304-03-C]: Aviza Pantheon ALD chamber
[CVD304-03-E]: Aviza Pantheon ALD chamber
| 2004 | AVIZA | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CVD304-03.pdf |
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[IMP306-01]: AXCELIS Optima MC; Axcelis Medium Current Implanter OptimaMD, 1-250keV singly charged, single wafer, 6 bottle gas box, Eterna ion source (W), dual vaporizer, Plasma Flood Gun, electro-static chuck,; Weight: 12942,3 kg; Dimension: 7166x3145x2980 mm.
| 2007 | ACXELIS | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/IMP306-01.pdf |
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Brightfield patterned wafer inspector, memory-specific
selectable broadband DUV/UV visible inspection
SW: 10.5.358.2
MainUI_PF_CBL, MIAINUI_PF_1.0.0919.4F.3207
| 2007 | KLA-Tencor | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES315-11_.pdf |
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[FOT320-01]: CANON FPA5500 iZ; Canon exposure tool (stepper, 365nm wavelength); Weight: 11440 kg; Dimension: 2300 x 2600 x 3400 mm.
| 2001 | Canon | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT320-01.pdf |
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[FOT320-02]: CANON FPA5500 iZ; Canon exposure tool (stepper, 365nm wavelength); Weight: 11440 kg; Dimension: 2300 x 2600 x 3400 mm.
| 2001 | Canon | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT320-02.pdf |
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[FOT320-03]: CANON FPA5500 iZ; Canon exposure tool (stepper, 365nm wavelength); Weight: 11440 kg; Dimension: 2300 x 2600 x 3400 mm.
| 2001 | Canon | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT320-03.pdf |
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[FOT320-06]: CANON FPA5500 iZ; Canon exposure tool (stepper, 365nm wavelength); Weight: 11440 kg; Dimension: 2300 x 2600 x 3400 mm.
| 2001 | Canon | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT320-06.pdf |
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[FOT320-08]: CANON FPA5500 iZ; Canon exposure tool (stepper, 365nm wavelength); Weight: 11440 kg; Dimension: 2300 x 2600 x 3400 mm.
| 2001 | Canon | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT320-08.pdf |
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[FOT320-05]: CANON FPA5500 iZ; Canon exposure tool (stepper, 365nm wavelength); Weight: 11440 kg; Dimension: 2300 x 2600 x 3400 mm.
| 2001 | Canon | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT320-05.pdf |
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[FOT321-01]: CANON FPA5500 iZ; Canon exposure tool (stepper, 365nm wavelength); Weight: 11440 kg; Dimension: 2300 x 2600 x 3400 mm.
| 2001 | Canon | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT321-01.pdf |
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[FOT320-09]: CANON FPA5500 iZ; Canon exposure tool (stepper, 365nm wavelength); Weight: 11440 kg; Dimension: 2300 x 2600 x 3400 mm.
| 2001 | Canon | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT320-09.pdf |
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[FOT320-10]: CANON FPA5500 iZ; Canon exposure tool (stepper, 365nm wavelength); Weight: 11440 kg; Dimension: 2300 x 2600 x 3400 mm.
| 2001 | Canon | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT320-10.pdf |
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[FOT320-11]: CANON FPA5500 iZ; Canon exposure tool (stepper, 365nm wavelength); Weight: 11441 kg; Dimension: 2300 x 2600 x 3400 mm.
| 2002 | Canon | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT320-11.pdf |
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[FOT320-04]: CANON FPA5500 iZ; Canon exposure tool (stepper, 365nm wavelength); Weight: 11440 kg; Dimension: 2300 x 2600 x 3400 mm.
| 2001 | Canon | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT320-04.pdf |
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[FOT321-02]: CANON FPA5500 iZ; Canon exposure tool (stepper, 365nm wavelength); Weight: 11440 kg; Dimension: 2300 x 2600 x 3400 mm.
| 2002 | Canon | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT321-02.pdf |
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[FOT320-13]: CANON FPA5500 iZ; Canon exposure tool (stepper, 365nm wavelength); Weight: 11441 kg; Dimension: 2300 x 2600 x 3400 mm.
| 2002 | Canon | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/FOT320-13.pdf |
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[CVD305-04]: Centura Rev.4 Poly/ WSix ; AMAT Centura Mainframe; Weight: kg; Dimension: mm.
[CVD305-04-A]: POLYGen 300 chamber
[CVD305-04-B]: POLYGen 300 chamber
[CVD305-04-C]: DCSxZ 300 chamber
[CVD305-04-D]: POLYGen 300 chamber
| 2003 | AMAT | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CVD305-04.pdf |
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[CMP306-01]: EBARA FREX300; CMP cluster (polish modul, cleaner modul, FI), Ebara FREX300, left side equiped with aiHeadG2, right side aiHead GIII (head upgrade installed under evaluation agreement with Ebara)
and with integrated metrology system NOVA scan 3030 wet (SWR: 4.5r3b31)Oxide CMP using Klebosol 30N50 slurry
prepared for polish of special material such as Ruthenium but never used for it (no contamination!!!!) ; Weight: 10080 kg; Dimension: 4100 x 2700 x 2805 mm.
| 2003 | EBARA | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP306-01.pdf |
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[CMP306-02]: EBARA FREX300; CMP cluster (polish modul, cleaner modul, FI), Ebara FREX300, left side and right side aiG2 Sv1
and with integrated metrology system NOVA scan 3060 wet;Poly Si CMP using home brew alkalic slurry ; Weight: 10080 kg; Dimension: 4100 x 2700 x 2805 mm.
| 2004 | EBARA | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP306-02.pdf |
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[CMP306-03]: EBARA FREX300; CMP cluster (polish modul, cleaner modul, FI), Ebara FREX300, left side and right side aiG2 Sv1
and with integrated metrology system NOVA scan 3060 wetl; right side: STI CMP using Hitachi ceria based slurry
left side: Poly Si CMP using home brew alkalic slurry ; Weight: 10080 kg; Dimension: 4100 x 2700 x 2805 mm.
| 2004 | EBARA | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP306-03.pdf |
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[CMP306-04]: EBARA FREX300; CMP cluster (polish modul, cleaner modul, FI), Ebara FREX300, left side and right side aiG2 Sv1
and with integrated metrology system NOVA scan 3060; STI CMP using Hitachi ceria based slurry
; Weight: 10080 kg; Dimension: 4100 x 2700 x 2805 mm.
| 2005 | EBARA | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP306-04.pdf |
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[CMP308-01]: EBARA FREX300S; CMP cluster (polish modul, cleaner modul, FI), Ebara FREX300S equipped with G2Sv1 polish heads, eddy current and motor torque endpoint system platen A/Cand with integrated metrology system NOVA scan 3090 dry (SWR: 4.5r3b47) polish module A/B: Oxide CMP using Klebosol 30N50 slurry and TMAH
polish module C/D Ruthenium& W-CMP CMP using different kind of experiemntal slurries, currently tool decontaminated; Weight: 7208 kg; Dimension: 1620 x 750 x 2620 mm.
| | EBARA | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP308-01.pdf |
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[CMP308-02]: EBARA FREX300S; CMP cluster (polish modul, cleaner modul, FI), Ebara FREX300S equipped with G2Sv1 polish heads, equipped with eddy current and motor torque endpoint system platen A&C; W CMP using Cabot W2585 on platen A/C and
Klebosol 30N50 on platen B/D; Weight: 7208 kg; Dimension: 1620 x 750 x 2620 mm.
| 2006 | EBARA | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/CMP308-02.pdf |
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[MES376-02]: Eichhorn & Hausmann MX2012; Wafer geometry measurement tool Eichhorn & Hausmann MX2012; used for bow, warp and stress measurements
1 loadport Type: Brooks Fixload V6
Measurement Unit MXC 2012
Microfoft Windows 2000 5.00.2195 SP4 reg. 52200-OEM-0010983-34424
tool can handle 200mm wafers, but the measurement head must be converted from 69 sensors to 37 sensors.Option: SECS/GEM Interface licence: 2004-0712-1351-5756
| 2001 | Eichhorn & Hausmann | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES376-02_.pdf |
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[MES376-01]: Eichhorn & Hausmann MX2012; Wafer geometry measurement tool Eichhorn & Hausmann MX2012; used for bow, warp and stress measurements;
Measurement Unit MXC 2012
MX-NT Version 2.135(Build 1158) = Operating Software
Option: Stress/Delta licence: 0000-0000-0000-0000tool can handle 200mm wafers, but the measurement head must be converted from 69 sensors to 37 sensors.
| 1998 | Eichhorn & Hausmann | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES376-01_.pdf |
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[SPU301-02]: Endura Mainframe P4; AMAT Endura PVD Mainframe; Weight: kg; Dimension: mm.
[SPU301-02-1]: SIP Chamber with LTESC
[SPU301-02-2]: ALPS Al Chamber
[SPU301-02-3]: Al ESC Chamber
[SPU301-02-4]: Al ESC Chamber -->additional information see PDF file
| 2000 | AMAT | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/SPU301-02.pdf |
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[SPU301-03]: Endura Mainframe P4; AMAT Endura PVD Mainframe; Weight: kg; Dimension: mm.
[SPU301-03-1]: SIP Chamber with LTESC
[SPU301-03-2]: ALPS Al Chamber
[SPU301-03-3]: Al ESC Chamber
[SPU301-03-4]: Al ESC Chamber -->additional information see PDF file
| 2001 | AMAT | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/SPU301-03.pdf |
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[OFE337-01]: Epi CENTURA 300mm System; AMAT Centura Epitaxy tool with 2 chambers; Weight: kg; Dimension: mm.
[OFE337-01-A]: camber A EPI
[OFE337-01-B]: camber B EPI
[OFE337-01-MF]: Power Supply for AMAT Furnace
| | AMAT | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/OFE337-01.pdf |
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Unique capability to measure film stress to 900 degree C, options to 1100 C.
Unique capability to measure out-gassing with a RGA unit during a heating cycle.
Capable to measure wafers from 50 mm to 300 mm in diameters.
Capable to pump down to 1E-6 torr to prevent film oxidation during heating.
FSM 900TC-vac series Integrated Metrology System for simultaneous
1) Film Stress Hysteresis Studies
2) Thermal Stability Evaluation
3) Thermal Desorption Spectra
4) Shrinkage Studies
5) Reflectivity Studies
6) Coefficient of Thermal Expansion Measurements
Chiler: TU 40/80 - EDWARDS
Vacuumpump: EDWARDS GVSP-30
| 2004 | Frontier Semiconductor Inc. | http://www.qimonda-dresden.de/Freigegebene%20Dokumente/EquipmentPDFs/MES310-01_.pdf |